DCMSIP/HPPMS (Cr,Al,V)N and (Cr,Al,W)N thin films for ... ScienceDirect
The pretreatment was followed by the actual coating process. For the deposition of the (Cr,Al,V)N and (Cr,Al,W)N, four cathodes were used. A Cr target with 20 pieces of diameter 15 mm Al plugs [14], [15] (CrAl20) (purity: Cr % and Al %) and a Cr target (purity: %), which were connected to one HPPMS power supply each, were used. Further an Al target with 20 pieces of diameter 15 ...